This title appears in the Scientific Report :
2012
Please use the identifier:
http://dx.doi.org/10.1007/s00216-011-5435-z in citations.
Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − x Fe x )1 + x O3 − δ thin films for tunable passive microwave applications
Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − x Fe x )1 + x O3 − δ thin films for tunable passive microwave applications
The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscatterin...
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Personal Name(s): | Stemme, F. (Corresponding author) |
---|---|
Geßwein, H. / Drahus, M. D. / Holländer, Bernhard / Azucena, C. / Binder, J. R. / Eichel, Rüdiger-A. / Haußelt, J. / Bruns, M. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; PGI-9 JARA-FIT; JARA-FIT |
Published in: | Analytical and bioanalytical chemistry, 403 (2012) 3, S. 643 - 650 |
Imprint: |
Berlin
Springer
2012
|
DOI: |
10.1007/s00216-011-5435-z |
Document Type: |
Journal Article |
Research Program: |
Frontiers of charge based Electronics |
Publikationsportal JuSER |
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245 | |a Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − x Fe x )1 + x O3 − δ thin films for tunable passive microwave applications | ||
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520 | |a The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film. The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films. Figure Cross section of the RF magnetron co-sputter setup and the X-ray phototelectron spectroscopy iron spectrum of a co-sputtered iron doped Barium strontium titanate thin film Published in the special paper collection on Solid State Analysis (FKA 16) with guest editor G. Friedbacher. | ||
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