This title appears in the Scientific Report :
2012
Please use the identifier:
http://dx.doi.org/10.1016/j.tsf.2011.04.098 in citations.
As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering
As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering
This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm a...
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Personal Name(s): | Zhang, W. |
---|---|
Bunte, E. / Ruske, F. / Köhl, D. / Besmehn, A. / Worbs, J. / Siekmann, H. / Kirchhoff, J. / Gordijn, A / Hüpkes, J. | |
Contributing Institute: |
Photovoltaik; IEK-5 Zentralabteilung für Chemische Analysen; ZCH |
Published in: | Thin solid films, 520 (2012) S. 4208 - 4213 |
Imprint: |
Amsterdam [u.a.]
Elsevier
2012
|
Physical Description: |
4208 - 4213 |
DOI: |
10.1016/j.tsf.2011.04.098 |
Document Type: |
Journal Article |
Research Program: |
Erneuerbare Energien |
Series Title: |
Thin Solid Films
520 |
Subject (ZB): | |
Publikationsportal JuSER |
This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (>80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2). (C) 2011 Elsevier B.V. All rights reserved. |