This title appears in the Scientific Report :
2008
Please use the identifier:
http://dx.doi.org/10.1063/1.2972135 in citations.
Please use the identifier: http://hdl.handle.net/2128/17138 in citations.
Wedgelike ultrathin epitaxial BaTiO3 films for studies of scaling effects in ferroelectrics
Wedgelike ultrathin epitaxial BaTiO3 films for studies of scaling effects in ferroelectrics
To study ferroelectric size effects in heteroepitaxial SrRuO3/BaTiO3/SrRuO3 capacitors, ultrathin BaTiO3 layers were deposited in wedge form across SrTiO3 substrates. The wedgelike films were fabricated by using either an off-center substrate-target geometry or via a moveable shutter during high-pre...
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Personal Name(s): | Petraru, A. |
---|---|
Kohlstedt, H. / Poppe, U. / Waser, R. / Solbach, A. / Klemradt, U. / Schubert, J. / Zander, W. / Pertsev, N. A. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 JARA-FIT; JARA-FIT Mikrostrukturforschung; IFF-8 Elektronische Materialien; IFF-6 |
Published in: | Applied physics letters, 93 (2008) S. 072902 |
Imprint: |
Melville, NY
American Institute of Physics
2008
|
Physical Description: |
072902 |
DOI: |
10.1063/1.2972135 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Series Title: |
Applied Physics Letters
93 |
Subject (ZB): | |
Link: |
Get full text OpenAccess OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/17138 in citations.
To study ferroelectric size effects in heteroepitaxial SrRuO3/BaTiO3/SrRuO3 capacitors, ultrathin BaTiO3 layers were deposited in wedge form across SrTiO3 substrates. The wedgelike films were fabricated by using either an off-center substrate-target geometry or via a moveable shutter during high-pressure sputter deposition. The crystallinity, composition, and surface roughness along wedgelike BaTiO3 films were verified by x-ray diffraction, Rutherford backscattering spectrometry, and atomic force microscopy, respectively. The electrical measurements performed at 77 K showed that, despite progressive reduction in remanent polarization as the film thickness decreases even the 3.5-nm-thick BaTiO3 film retains a large remanent polarization of 28 mu C/cm(2). (C) 2008 American Institute of Physics. |