This title appears in the Scientific Report : 2003 

A long-term stable macroporous-type EIS structure for electrochemical sensor applications
Simonis, A.
Ruge, C. / Müller-Veggian, M. / Lüth, H. / Schöning, M. J.
Institut für Bio- und Chemosensoren; ISG-2
Institut für Halbleiterschichten und Bauelemente; ISG-1
Sensors and actuators / B, 91 (2003) S. 21 - 25
Amsterdam [u.a.] Elsevier Science 2003
21 - 25
Journal Article
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Sensors and Actuators B 91
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A novel macroporous-type EIS (electrolyte-insulator-semiconductor) sensor for the detection of (bio-)chemical substances in aqueous solutions is presented. For the preparation of the macroporous layer, a specific cell configuration has been designed, which allows the formation of macroporous Si during the anodic etching process by means of a liquid contact. After the etching process, the SiO2/Si3N4 double layer insulator can be advantageously deposited by high-temperature processes, like thermal oxidation and low-pressure chemical vapour deposition (LPCVD) to realise the porous pH sensor. The so prepared pH sensors have an averaged sensitivity of about 59 mV/pH (concentration range between pH 4 and 9) during a period of more than 1 year. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised by simple physical adsorption into the porous structure. The sensitivity of the biosensor was about 140 mV/mM in the concentration range between 0.01 and 0.5 mM penicillin G. (C) 2003 Elsevier Science B.V. All rights reserved.