This title appears in the Scientific Report : 2003 

Chemical sensor as physical sensor: ISFET-based flow-velocity, flow-direction and diffusion-coefficient sensor
Poghossian, A.
Berndsen, H. K. / Schöning, M. J.
Institut für Bio- und Chemosensoren; ISG-2
Sensors and actuators / B, 95 (2003) S. 384 - 390
Amsterdam [u.a.] Elsevier Science 2003
384 - 390
Journal Article
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Sensors and Actuators B 95
Please use the identifier: in citations.
An ion-sensitive field-effect transistor (ISFET), which is well known as a (bio-)chemical sensor is utilised for the development of a novel flow-velocity, flow-direction and diffusion-coefficient sensor. The proposed sensor presents a sensor-actuator system and consists of an ion generator and a pH ISFET that detects the in situ electrochemically generated H+- or OH--ions. A good linearity between the measured flow-velocity with the ISFET and the delivered flow rate of the pump was observed. Since the ISFET has a short response time in the millisecond range, it can be utilised as an excellent detector for the measurement of flow-velocity in a wide range. The experimental results of the determination of the flow-direction and diffusion-coefficient of ions with the ISFET are presented, too. (C) 2003 Elsevier B.V. All rights reserved.