This title appears in the Scientific Report : 2003 

Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer
Gerber, P.
Roelofs, A. / Lohse, O. / Kügeler, C. / Tiedke, S. / Böttger, U. / Waser, R.
Elektrokeramische Materialien; IFF-EKM
Review of scientific instruments, 74 (2003) S. 2613 - 2615
[S.l.] American Institute of Physics 2003
2613 - 2615
Journal Article
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Review of Scientific Instruments 74
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An evolution of the double-beam laser interferometer used for piezoelectric measurements in ferroelectric thin films is reported. Measuring the d(33) hysteresis of a ferroelectric material using lock-in technique with large time constants requires a varying bias field to be applied to the sample over a long period of time. This long-term application leads to electrical stress during the measurement. We present a measurement technique using a different source for the applied field and a varied method for averaging the interferometric response. The measurement time for a complete d(33) hysteresis will be shortened down to several seconds. Also, the cycle frequency becomes comparable to electrical hysteresis measurements. Experimental results on quartz and Pb(Zr-(X),Ti(1-X))O-3 are given to demonstrate the capabilities of the interferometer and the new measurement method. (C) 2003 American Institute of Physics.