This title appears in the Scientific Report :
2003
Please use the identifier:
http://dx.doi.org/10.1063/1.1544415 in citations.
Please use the identifier: http://hdl.handle.net/2128/1238 in citations.
Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer
Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer
An evolution of the double-beam laser interferometer used for piezoelectric measurements in ferroelectric thin films is reported. Measuring the d(33) hysteresis of a ferroelectric material using lock-in technique with large time constants requires a varying bias field to be applied to the sample ove...
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Personal Name(s): | Gerber, P. |
---|---|
Roelofs, A. / Lohse, O. / Kügeler, C. / Tiedke, S. / Böttger, U. / Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: | Review of scientific instruments, 74 (2003) S. 2613 - 2615 |
Imprint: |
[S.l.]
American Institute of Physics
2003
|
Physical Description: |
2613 - 2615 |
DOI: |
10.1063/1.1544415 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Review of Scientific Instruments
74 |
Subject (ZB): | |
Link: |
Get full text OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/1238 in citations.
An evolution of the double-beam laser interferometer used for piezoelectric measurements in ferroelectric thin films is reported. Measuring the d(33) hysteresis of a ferroelectric material using lock-in technique with large time constants requires a varying bias field to be applied to the sample over a long period of time. This long-term application leads to electrical stress during the measurement. We present a measurement technique using a different source for the applied field and a varied method for averaging the interferometric response. The measurement time for a complete d(33) hysteresis will be shortened down to several seconds. Also, the cycle frequency becomes comparable to electrical hysteresis measurements. Experimental results on quartz and Pb(Zr-(X),Ti(1-X))O-3 are given to demonstrate the capabilities of the interferometer and the new measurement method. (C) 2003 American Institute of Physics. |