This title appears in the Scientific Report : 2003 

Scaling of Pb(Zr,Ti)O3 thin films by the CSD method with a thickness down to 50 nm and nanosized top electrodes
Ellerkmann, U.
Schneller, T. / Böttger, U. / Waser, R.
Elektrokeramische Materialien; IFF-EKM
4th Asian Meeting on Ferroelectrics (AMF)
2003
Bangalore, India 2003-12-12
Poster
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Description not available.