This title appears in the Scientific Report :
2003
Scaling of Pb(Zr,Ti)O3 thin films by the CSD method with a thickness down to 50 nm and nanosized top electrodes
Scaling of Pb(Zr,Ti)O3 thin films by the CSD method with a thickness down to 50 nm and nanosized top electrodes
Saved in:
Personal Name(s): | Ellerkmann, U. |
---|---|
Schneller, T. / Böttger, U. / Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: |
4th Asian Meeting on Ferroelectrics (AMF) |
Imprint: |
2003
|
Conference: | Bangalore, India 2003-12-12 |
Document Type: |
Poster |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
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