This title appears in the Scientific Report :
2003
Please use the identifier:
http://dx.doi.org/10.1016/S0924-4247(03)00354-6 in citations.
Split-electrode drift device as magnetic-field sensor
Split-electrode drift device as magnetic-field sensor
A new magnetic field sensor based on electron transport and diffusion in the depletion region of reversely biased silicon PIN devices with an injector line within the cathode and a gap between the two anode halves is presented. Its field sensitivity and field resolution are derived from transport an...
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Personal Name(s): | Schmitz, V. |
---|---|
Schelten, J. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2003
|
Physical Description: |
25 - 33 |
DOI: |
10.1016/S0924-4247(03)00354-6 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Sensors and Actuators A
109 |
Subject (ZB): | |
Publikationsportal JuSER |
A new magnetic field sensor based on electron transport and diffusion in the depletion region of reversely biased silicon PIN devices with an injector line within the cathode and a gap between the two anode halves is presented. Its field sensitivity and field resolution are derived from transport and diffusion equations with magnetic fields. The PIN devices were fabricated in CMOS technology. The fabrication required layer processing on both wafer sides with eight masks and 60 process steps performed in the clean room of the institute. Magnetic measurements revealed the following main results:(1) The magnetic field sensitivity was 1.6 1 T-1, i.e. 23 times larger than that of Hall probes.(2) The magnetic response was linear within the field limit of 0.15 T.(3) Due to the alignment accuracy of less than +/-1 mum magnetic offsets of up to 0.05 T were observed.(4) The present sensor design does not allow scaling down to mum dimensions.(5) Major design changes are discussed to avoid offset and to implement mum dimensions. (C) 2003 Elsevier B.V. All rights reserved. |