Description: Boron activation and diffusion in silicon and strained silicon-on-insulator by rapid thermal and flash lamp annealings

This title appears in the Scientific Report : 2008

Boron activation and diffusion in silicon and strained silicon-on-insulator by rapid thermal and flash lamp annealings

We present experimental results on the activation and diffusion behaviors of boron in silicon-on-insulator and strained silicon-on-insulator using standard rapid thermal processing treatments as well as flash lamp annealing. After boron implantation at different doses and at a low energy of 1 keV, s...

Personal Name(s):	Lanzerath, F.
	Buca, D. / Trinkaus, H. / Goryll, M. / Mantl, S. / Knoch, J. / Breuer, U. / Skorupa, W. / Ghyselen, B.
Contributing Institute:	Halbleiter-Nanoelektronik; IBN-1 JARA-FIT; JARA-FIT Zentralabteilung für Chemische Analysen; ZCH
Published in:	Journal of applied physics, 104 (2008) S. 044908
Imprint:	Melville, NY American Institute of Physics 2008
Physical Description:	044908
DOI:	10.1063/1.2968462
Document Type:	Journal Article
Research Program:	Grundlagen für zukünftige Informationstechnologien
Series Title:	Journal of Applied Physics 104
Subject (ZB):	J
Link:	Get full text OpenAccess OpenAccess
	Publikationsportal JuSER

Please use the identifier: http://dx.doi.org/10.1063/1.2968462 in citations.
Please use the identifier: http://hdl.handle.net/2128/17295 in citations.

We present experimental results on the activation and diffusion behaviors of boron in silicon-on-insulator and strained silicon-on-insulator using standard rapid thermal processing treatments as well as flash lamp annealing. After boron implantation at different doses and at a low energy of 1 keV, samples were annealed to activate the dopants, and secondary ion mass spectrometry and Hall measurements were carried out to determine boron diffusion and the amount of activated dopants, respectively. In contrast to rapid thermal annealing, flash lamp annealing enables the activation without significant diffusion of dopants. In addition, we investigated the effect of coating the samples with antireflection layers to increase the absorbed energy during flash annealing. As a result, the activation was increased significantly to values comparable with the activation obtained with standard annealing. Furthermore, the relation between the observed boron diffusion and activation as a function of the implantation and annealing parameters is discussed in terms of the kinetics of the defects involved in these processes. (C) 2008 American Institute Of Physics.