This title appears in the Scientific Report :
1998
Selectively grown vertical Si MOS transistor with reduced overlap capacitances
Selectively grown vertical Si MOS transistor with reduced overlap capacitances
Saved in:
Personal Name(s): | Klaes, D. |
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Moers, J. / Tönnesmann, A. / Wickenhäuser, S. / Vescan, L. / Marso, M. A. / Grabolla, T. / Grimm, M. / Lüth, H. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Thin films epitaxial growth and nanostructures : EMRS Spring Conference |
Imprint: |
1998
|
Conference: | Strasbourg 1998-06-16 00:00:00 |
Document Type: |
Talk (non-conference) |
Research Program: |
Halbleiterbauelemente und Analytik |
Publikationsportal JuSER |
Description not available. |