Description: Ultrafast Si-based MSM mesa photodetectors with optical waveguide connection

This title appears in the Scientific Report : 2001

Ultrafast Si-based MSM mesa photodetectors with optical waveguide connection

We have fabricated ultrafast Si metal-semiconductor-metal photodetectors and connected them to optical waveguides. The photodetectors are fabricated in a vertical structure consisting of a top metallization (M1), epitaxial silicon, epitaxial metallic CoSi2 (M2) and a Si substrate. In the visible reg...

Personal Name(s):	Buchal, C.
	Löken, M. / Siegert, M. / Roelofs, A. / Kappius, L. / Mantl, S.
Contributing Institute:	Institut für Halbleiterschichten und Bauelemente; ISG-1
Published in:	Materials science in semiconductor processing, 3 (2000) S. 399
Imprint:	Amsterdam [u.a.] Elsevier Science 2000
Physical Description:	399
DOI:	10.1016/S1369-8001(00)00063-9
Document Type:	Journal Article
Research Program:	Ionentechnik
Series Title:	Materials Science in Semiconductor Processing 3
Subject (ZB):	J optoelectronics Si-based MSM photodetector optical waveguides
	Publikationsportal JuSER

Please use the identifier: http://dx.doi.org/10.1016/S1369-8001(00)00063-9 in citations.

We have fabricated ultrafast Si metal-semiconductor-metal photodetectors and connected them to optical waveguides. The photodetectors are fabricated in a vertical structure consisting of a top metallization (M1), epitaxial silicon, epitaxial metallic CoSi2 (M2) and a Si substrate. In the visible region, photons create electron-hole pairs in the epitaxial Si. At infrared wavelength the energy of the photons is not sufficient to create electron-hole pairs in the Si. In this case, the Schottky contacts of both metallizations provide electron and holes from internal photoemission. The best detectors show a pulse width of 3.2 ps full-width at half-maximum at 1.25 mum wavelength and room temperature. We present data for the coupling of the detectors to a monomode glass fiber and to polymer-based waveguides on the Si chip. (C) 2001 Elsevier Science Ltd. Al rights reserved.