This title appears in the Scientific Report :
2001
Please use the identifier:
http://dx.doi.org/10.1002/1521-4109(200105)13:8/9<727::AID-ELAN727>3.0.CO;2-B in citations.
Pulsed laser deposition - an innovative technique for preparing inorganic thin films
Pulsed laser deposition - an innovative technique for preparing inorganic thin films
The pulsed laser deposition (PLD) technique, originally invented in the seventies, has been investigated as an alternative preparation method to realize thin film materials for chemical microsensor applications. Dielectric oxide materials of Al2O3 and Ta2O5 serve as pH-sensitive gate insulators for...
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Personal Name(s): | Schöning, M. J. |
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Mourzina, Y. G. / Schubert, J. / Zander, W. / Legin, A. / Vlasov, Y. G. / Lüth, H. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 Institut für Bio- und Chemosensoren; ISG-2 |
Published in: | Electroanalysis, 13 (2001) |
Imprint: |
Weinheim
Wiley-VCH-Verl.
2001
|
DOI: |
10.1002/1521-4109(200105)13:8/9<727::AID-ELAN727>3.0.CO;2-B |
Document Type: |
Journal Article |
Research Program: |
Ionentechnik Halbleiterbauelemente und Analytik Halbleiterschichtsysteme und Mesoskopische Strukturen |
Series Title: |
Electroanalysis
13 |
Subject (ZB): | |
Publikationsportal JuSER |
The pulsed laser deposition (PLD) technique, originally invented in the seventies, has been investigated as an alternative preparation method to realize thin film materials for chemical microsensor applications. Dielectric oxide materials of Al2O3 and Ta2O5 serve as pH-sensitive gate insulators for capacitive EIS (electrolyte-insulator-semiconductor) structures. Chalcogenide glass materials are the basis of potentiometric thin film ISEs (ion-selective electrodes): Their application field is the heavy metal determination of. e.g.. cadmium, lead copper and thallium. For both sensor types; high. nearly-Nernstian sensitivity, a good long-term stability, a short response time and a selectivity behavior that is comparable with macroscopic bulk sensors have been achieved. |