This title appears in the Scientific Report :
2001
Photoenhanced wet etching of gallium nitride in KOH-based solution
Photoenhanced wet etching of gallium nitride in KOH-based solution
Saved in:
Personal Name(s): | Skriniarova, J. |
---|---|
Bochem, P. / Fox, P. T. / Kordos, P. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 Institut für Bio- und Chemosensoren; ISG-2 |
Published in: | Journal of vacuum science & technology / B, 19 (2001) S. 1721 |
Imprint: |
New York, NY
Inst.
2001
|
Physical Description: |
1721 |
Document Type: |
Journal Article |
Research Program: |
Ionen- und Lithographietechnik Halbleiterbauelemente und Analytik |
Series Title: |
Journal of Vacuum Science and Technology B
19 |
Publikationsportal JuSER |
Description not available. |