This title appears in the Scientific Report :
2001
Nucleation and growth of hydrogenated microcrystalline silicon films : new insights from scanning probe microscopies
Nucleation and growth of hydrogenated microcrystalline silicon films : new insights from scanning probe microscopies
For mixed-phase films prepared by plasma enhanced chemical vapour deposition the density of crystallites in an amorphous matrix was measured as a function of the hydrogen-dilution of the source gas. General features of the observed growth mode can be described in terms of a genuine surface model inc...
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Personal Name(s): | Herion, J. |
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Ross, C. | |
Contributing Institute: |
Institut für Photovoltaik; IPV |
Published in: | Solid state phenomena, 80/81 (2001) S. 77 - 82 |
Imprint: |
Uetikon
Trans Tech Publ.
2001
|
Physical Description: |
77 - 82 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen und Technologie von Dünnschichtsolarzellen |
Series Title: |
Solid State Phenomena
80/81 |
Subject (ZB): | |
Publikationsportal JuSER |
For mixed-phase films prepared by plasma enhanced chemical vapour deposition the density of crystallites in an amorphous matrix was measured as a function of the hydrogen-dilution of the source gas. General features of the observed growth mode can be described in terms of a genuine surface model incorporating autocatalytic crystallization. We investigated the chemical transport of silicon-related species in a hydrogen plasma and found it to be of major importance under the present conditions. The results cast some doubts on previous concepts relating to the existence of a growth zone and of amorphous incubation layers as observed by in-situ ellipsometry. |