This title appears in the Scientific Report :
2009
Please use the identifier:
http://dx.doi.org/10.1016/j.tsf.2009.01.115 in citations.
Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells
Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells
Crystalline silicon carbide alloys have a very high potential as transparent conductive window layers in thin-film solar cells provided they can be prepared in thin-film form and at compatible deposition temperatures. The low-temperature deposition of such material in microcrystalline form (mu c-Si:...
Saved in:
Personal Name(s): | Finger, F. |
---|---|
Astakhov, O. / Bronger, T. / Carius, R. / Chen, T. / Dasgupta, A. / Gordijn, A. / Houben, L. / Huang, Y. / Klein, S. / Luysberg, M. / Wang, H. / Xiao, L. | |
Contributing Institute: |
Mikrostrukturforschung; IFF-8 JARA-ENERGY; JARA-ENERGY Photovoltaik; IEF-5 |
Published in: | Thin solid films, 517 (2009) S. 3507 - 3512 |
Imprint: |
Amsterdam [u.a.]
Elsevier
2009
|
Physical Description: |
3507 - 3512 |
DOI: |
10.1016/j.tsf.2009.01.115 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen für zukünftige Informationstechnologien Erneuerbare Energien |
Series Title: |
Thin Solid Films
517 |
Subject (ZB): | |
Publikationsportal JuSER |
Crystalline silicon carbide alloys have a very high potential as transparent conductive window layers in thin-film solar cells provided they can be prepared in thin-film form and at compatible deposition temperatures. The low-temperature deposition of such material in microcrystalline form (mu c-Si:C:H) was realized by use of monomethylsilane precursor gas diluted in hydrogen with the Hot-Wire Chemical Vapor Deposition process. A wide range of deposition parameters has been investigated and the structural, electronic and optical properties of the mu c-SiC:H thin films have been studied. The material, which is strongly n-type from unintentional doping, has been used as window layer in n-side illuminated microcrystalline silicon solar cells. High short-circuit current densities are obtained due to the high transparency of the material resulting in a maximum solar cell conversion efficiency of 9.2%. (C) 2009 Elsevier B.V. All rights reserved. |