This title appears in the Scientific Report :
2005
Please use the identifier:
http://dx.doi.org/10.1063/1.2135891 in citations.
Please use the identifier: http://hdl.handle.net/2128/2023 in citations.
Ferroelectric properties of epitaxial BaTiO3 thin films and heterostructures on different substrates
Ferroelectric properties of epitaxial BaTiO3 thin films and heterostructures on different substrates
Ferroelectric thin films of BaTiO3 and BaTiO3/SrRuO3 epitaxial heterostructures on different single-crystalline substrates were fabricated by pulsed laser deposition. The BaTiO3 films of 100-400 nm thickness show high structural perfection and c-axis-oriented growth. For the electrical characterizat...
Saved in:
Personal Name(s): | Trithaveesak, O. |
---|---|
Schubert, J. / Buchal, Ch. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 Center of Nanoelectronic Systems for Information Technology; CNI |
Published in: | Journal of applied physics, 98 (2005) S. 114101 |
Imprint: |
Melville, NY
American Institute of Physics
2005
|
Physical Description: |
114101 |
DOI: |
10.1063/1.2135891 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Journal of Applied Physics
98 |
Subject (ZB): | |
Link: |
Get full text OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/2023 in citations.
Ferroelectric thin films of BaTiO3 and BaTiO3/SrRuO3 epitaxial heterostructures on different single-crystalline substrates were fabricated by pulsed laser deposition. The BaTiO3 films of 100-400 nm thickness show high structural perfection and c-axis-oriented growth. For the electrical characterization of the BaTiO3 in a thin-film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The results are compared to the current experimental and theoretical models. Special consideration is given to the model of charge injection from the electrodes. |