This title appears in the Scientific Report :
2007
Please use the identifier:
http://dx.doi.org/10.1002/pip.743 in citations.
Deposition of Highly Efficient Microcrystalline Silicon Solar Cells under Conditions of Low H2 Dilution: the Role of the Transient Depletion Induced Incubation Layer
Deposition of Highly Efficient Microcrystalline Silicon Solar Cells under Conditions of Low H2 Dilution: the Role of the Transient Depletion Induced Incubation Layer
This paper addresses the plasma deposition of highly efficient microcrystalline silicon (mu c-Si:H) p-i-n solar cells under conditions of high SiH4 utilization and low H-2 dilution. It was established that the transient depletion of the initially present SiH4 source gas induces the formation of an a...
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Personal Name(s): | Van den Donker, M. |
---|---|
Rech, B. / Finger, F. / Houben, L. / Kessels, W. M. M. / van de Sanden, M. C. M. | |
Contributing Institute: |
Photovoltaik; IEF-5 |
Published in: | Progress in photovoltaics, 15 (2007) S. 291 - 301 |
Imprint: |
Chichester
Wiley
2007
|
Physical Description: |
291 - 301 |
DOI: |
10.1002/pip.743 |
Document Type: |
Journal Article |
Research Program: |
Erneuerbare Energien |
Series Title: |
Progress in Photovoltaics : Research and Applications
15 |
Subject (ZB): | |
Publikationsportal JuSER |
This paper addresses the plasma deposition of highly efficient microcrystalline silicon (mu c-Si:H) p-i-n solar cells under conditions of high SiH4 utilization and low H-2 dilution. It was established that the transient depletion of the initially present SiH4 source gas induces the formation of an amorphous incubation layer that prevents successful crystallite nucleation in the i-layer and leads to poor solar cell performance. The effect of this transient depletion induced incubation layer on solar cells was made visible through dedicated solar cell deposition series and selected area electron diffraction measurements. Applying a gas flow procedure at plasma ignition it was succeeded to prepare state-of-the-art mu c-Si:H material and solar cells under low hydrogen dilution conditions, highlighted by mu c-Si:H solar cells of up to 9.5% efficiency prepared using an undiluted source gas flow consisting solely of SiH4. Copyright (c) 2007 John Wiley & Sons, Ltd. |