@book{ SolrJuSER-juser_58994, title = {Microstructure of highly crystalline silicon carbide thin films grown by HWCVD technique}, series = {Thin Solid Films}, author = {Dasgupta, A.}, editor = {Klein, S.}, editor = {Houben, L.}, editor = {Carius, R.}, editor = {Finger, F.}, editor = {Luysberg, M.}, address = {Amsterdam u.a.}, publisher = {Elsevier}, year = {2008}, note = {Record converted from VDB: 12.11.2012}, url = {http://dx.doi.org/10.1016/j.tsf.2007.06.055} }