This title appears in the Scientific Report :
2007
Investigation on layer properties of amorphous and microcrystalline silicon deposited with moving substrates in combination with a VHF linear plasma source designed for the fabrication of large area devices
Investigation on layer properties of amorphous and microcrystalline silicon deposited with moving substrates in combination with a VHF linear plasma source designed for the fabrication of large area devices
Saved in:
Personal Name(s): | Strobel, C. |
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Zimmermann, T. / Albert, M. / Bartha, J. W. / Beyer, W. / Kuske, J. | |
Contributing Institute: |
Photovoltaik; IEF-5 |
Published in: |
Proceedings of the 22nd EUPVSEC (European Photovoltaic Solar Energy Conference), Milan, Italy, 03.09.07 - 07 09 2007. - 2007. - S. 2062 - 2067 |
Imprint: |
2007
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Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Erneuerbare Energien |
Publikationsportal JuSER |
Description not available. |