This title appears in the Scientific Report :
2008
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
Saved in:
Personal Name(s): | Moers, J. |
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Gerharz, J. / Trellenkamp, S. / von der Hart, A. / Grützmacher, D. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 Prozesstechnologie; IBN-PT Center of Nanoelectronic Systems for Information Technology; CNI |
Published in: |
ASDAM 2008 |
Imprint: |
2008
|
Conference: | Smolenice, Slovakia 2008-10-12 |
Document Type: |
Conference Presentation |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |