This title appears in the Scientific Report :
2008
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
Saved in:
Personal Name(s): | Moers, J. |
---|---|
Gerharz, J. / Trellenkamp, S. / von der Hart, A. / Grützmacher, D. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 Prozesstechnologie; IBN-PT Center of Nanoelectronic Systems for Information Technology; CNI |
Published in: |
ASDAM 2008 |
Imprint: |
2008
|
Conference: | Smolenice, Slovakia 2008-10-12 |
Document Type: |
Conference Presentation |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
LEADER | 02394nam a2200541 a 4500 | ||
---|---|---|---|
001 | 62724 | ||
005 | 20180211164622.0 | ||
037 | |a PreJuSER-62724 | ||
100 | 1 | |a Moers, J. |b 0 |u FZJ |0 P:(DE-Juel1)VDB5547 | |
111 | 2 | |c Smolenice, Slovakia |d 2008-10-12 | |
245 | |a The disposable Dot Field Effect Transistor: Process flow and overlay requirements | ||
260 | |c 2008 | ||
295 | 1 | 0 | |a ASDAM 2008 |
500 | |a Record converted from VDB: 12.11.2012 | ||
500 | |3 Presentation on a conference | ||
700 | 1 | |a Gerharz, J. |b 1 |u FZJ |0 P:(DE-Juel1)VDB76721 | |
700 | 1 | |a Trellenkamp, S. |b 2 |u FZJ |0 P:(DE-Juel1)128856 | |
700 | 1 | |a von der Hart, A. |b 3 |u FZJ |0 P:(DE-Juel1)VDB19481 | |
700 | 1 | |a Grützmacher, D. |b 4 |u FZJ |0 P:(DE-Juel1)125588 | |
909 | C | O | |o oai:juser.fz-juelich.de:62724 |p VDB |
913 | 1 | |k P42 |v Grundlagen für zukünftige Informationstechnologien |l Grundlagen für zukünftige Informationstechnologien (FIT) |b Schlüsseltechnologien |0 G:(DE-Juel1)FUEK412 |x 0 | |
914 | 1 | |y 2008 | |
970 | |a VDB:(DE-Juel1)99318 | ||
980 | |a VDB | ||
980 | |a ConvertedRecord | ||
980 | |a conf | ||
980 | |a I:(DE-Juel1)PGI-9-20110106 | ||
980 | |a I:(DE-Juel1)VDB381 | ||
980 | |a I:(DE-Juel1)VDB554 | ||
980 | |a UNRESTRICTED | ||
536 | |a Grundlagen für zukünftige Informationstechnologien |c P42 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK412 |x 0 | ||
336 | |a LECTURE_SPEECH |2 ORCID | ||
336 | |a Other |2 DataCite | ||
336 | |a ExWoSt-Informationen / 33 |0 33 |2 EndNote | ||
336 | |a Conference Presentation |0 PUB:(DE-HGF)6 |2 PUB:(DE-HGF) | ||
336 | |a INPROCEEDINGS |2 BibTeX | ||
336 | |a conferenceObject |2 DRIVER | ||
981 | |a I:(DE-Juel1)PGI-9-20110106 | ||
920 | |k Halbleiter-Nanoelektronik; IBN-1 |l Halbleiter-Nanoelektronik |d 31.12.2010 |g IBN |0 I:(DE-Juel1)VDB799 |x 0 | ||
981 | |a I:(DE-Juel1)VDB554 | ||
920 | |k Prozesstechnologie; IBN-PT |l Prozesstechnologie |g IBN |0 I:(DE-Juel1)VDB554 |x 2 | ||
981 | |a I:(DE-Juel1)VDB381 | ||
920 | |k Center of Nanoelectronic Systems for Information Technology; CNI |l Center of Nanoelectronic Systems for Information Technology |d 14.09.2008 |g CNI |z 381 |0 I:(DE-Juel1)VDB381 |x 1 | ||
990 | |a Moers, J. |b 0 |u FZJ |0 P:(DE-Juel1)VDB5547 | ||
991 | |a Grützmacher, Detlev |b 4 |u FZJ |0 P:(DE-Juel1)125588 | ||
991 | |a von der Hart, A. |b 3 |u FZJ |0 P:(DE-Juel1)VDB19481 | ||
991 | |a Trellenkamp, Stefan |b 2 |u FZJ |0 P:(DE-Juel1)128856 | ||
991 | |a Gerharz, J. |b 1 |u FZJ |0 P:(DE-Juel1)VDB76721 |