Hrunski, D., Grählert, W., Beese, H., Kilper, T., Gordijn, A., & Appenzeller, W. (2009). Control of plasma process instabilities during thin silicon film deposition. Amsterdam [u.a.]: Elsevier.

Hrunski, D., W. Grählert, H. Beese, T. Kilper, A. Gordijn, andfavorite W. Appenzeller. Control of Plasma Process Instabilities During Thin Silicon Film Deposition. Amsterdam [u.a.]: Elsevier, 2009.

Hrunski, D., et al. Control of Plasma Process Instabilities During Thin Silicon Film Deposition. Amsterdam [u.a.]: Elsevier, 2009.