A simple theory of single crystal sputtering
A simple theory of single crystal sputtering
A simple model is given for calculating the sputtering yield of single crystals as a function of the bombarding energy E for low-indexedbombarding directions. In a hard sphere approximation the transparency of the lattice for the penetrating ions is taken into account and the concept of focusing col...
| Personal Name(s): | Lehmann, C. (Corresponding author) |
|---|---|
| Contributing Institute: |
Publikationen vor 2000; PRE-2000; Retrocat |
| Imprint: |
Jülich
Kernforschungsanlage Jülich, Verlag
1965
|
| Physical Description: |
6 p. |
| Document Type: |
Report Book |
| Research Program: |
ohne Topic |
| Series Title: |
Berichte der Kernforschungsanlage Jülich
395 |
| Link: |
OpenAccess OpenAccess |
| Publikationsportal JuSER |
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| 245 | |a A simple theory of single crystal sputtering | ||
| 260 | |a Jülich |c 1965 |b Kernforschungsanlage Jülich, Verlag | ||
| 300 | |a 6 p. | ||
| 490 | 0 | |a Berichte der Kernforschungsanlage Jülich |v 395 | |
| 520 | |a A simple model is given for calculating the sputtering yield of single crystals as a function of the bombarding energy E for low-indexedbombarding directions. In a hard sphere approximation the transparency of the lattice for the penetrating ions is taken into account and the concept of focusing collisions is employed. Focusing collisions are assumed to be responsible for the highly anisotropic emission of surface atoms. Other than the atomic interaction potential no fitting parameters are used. As an example, the sputtering yield is calculated for the bombardment of Cu with Cu-ions for normal incidence onto (110)- (100)- and (111)-surfaces and for energies ranging from 1-15 keV. The result is compared with experimental data. | ||
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