This title appears in the Scientific Report : 2019 

Conductive AFM for nanoscale analysis of high-k dielectric metal oxides
Rodenbücher, Christian (Corresponding author)
Wojtyniak, Marcin / Szot, K.
Elektrochemische Verfahrenstechnik; IEK-14
JARA-FIT; JARA-FIT
Elektronische Materialien; PGI-7
Elektrochemische Verfahrenstechnik; IEK-3
Electrical Atomic Force Microscopy for Nanoelectronics
Cham Springer 2019
29 - 70
978-3-030-15611-4 (print)
978-3-030-15612-1 (electronic)
10.1007/978-3-030-15612-1_2
Contribution to a book
Fuel Cells
NanoScience and Technology
Please use the identifier: http://dx.doi.org/10.1007/978-3-030-15612-1_2 in citations.
Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.