This title appears in the Scientific Report :
2008
Please use the identifier:
http://dx.doi.org/10.1149/1.2982883 in citations.
Strained Silicon on Wafer Level by Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation
Strained Silicon on Wafer Level by Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation
| Personal Name(s): | Reiche, M. |
|---|---|
| Moutanabir, O. / Himcinschi, C. / Christiansen, S. / Erfurth, W. / Gösele, U. / Mantl, S. / Buca, D. / Zhao, Q. T. / Loo, R. / Nguyen, D. / Muster, F. / Petzold, M. | |
| Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 JARA-FIT; JARA-FIT |
| Imprint: |
Pennington, NJ
Electrochemical Society (ECS)
2008
|
| Physical Description: |
311 |
| DOI: |
10.1149/1.2982883 |
| Document Type: |
Contribution to a book |
| Research Program: |
Grundlagen für zukünftige Informationstechnologien |
| Series Title: |
ECS transactions
16 |
| Publikationsportal JuSER |
| LEADER | 02913nam a2200697 a 4500 | ||
|---|---|---|---|
| 001 | 885223 | ||
| 005 | 20201003142515.0 | ||
| 024 | 7 | |a 10.1149/1.2982883 |2 DOI | |
| 024 | 7 | |a 1938-5862 |2 ISSN | |
| 037 | |a FZJ-2020-03627 | ||
| 041 | |a eng | ||
| 082 | |a 540 | ||
| 100 | 1 | |a Reiche, M. |0 P:(DE-HGF)0 |b 0 | |
| 245 | |a Strained Silicon on Wafer Level by Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation | ||
| 260 | |a Pennington, NJ |c 2008 |b Electrochemical Society (ECS) | ||
| 300 | |a 311 | ||
| 490 | 0 | |a ECS transactions |0 PERI:(DE-600)2251888-5 |v 16 |x 1938-5862 | |
| 500 | |a Record converted from VDB: 12.11.2012 | ||
| 700 | 1 | |a Moutanabir, O. |0 P:(DE-HGF)0 |b 1 | |
| 700 | 1 | |a Himcinschi, C. |0 P:(DE-HGF)0 |b 2 | |
| 700 | 1 | |a Christiansen, S. |0 P:(DE-HGF)0 |b 3 | |
| 700 | 1 | |a Erfurth, W. |0 P:(DE-HGF)0 |b 4 | |
| 700 | 1 | |a Gösele, U. |0 P:(DE-HGF)0 |b 5 | |
| 700 | 1 | |a Mantl, S. |0 P:(DE-Juel1)VDB4959 |b 6 |u FZJ | |
| 700 | 1 | |a Buca, D. |0 P:(DE-Juel1)125569 |b 7 |u FZJ | |
| 700 | 1 | |a Zhao, Q. T. |0 P:(DE-Juel1)VDB5539 |b 8 |u FZJ | |
| 700 | 1 | |a Loo, R. |0 P:(DE-HGF)0 |b 9 | |
| 700 | 1 | |a Nguyen, D. |0 P:(DE-HGF)0 |b 10 | |
| 700 | 1 | |a Muster, F. |0 P:(DE-HGF)0 |b 11 | |
| 700 | 1 | |a Petzold, M. |0 P:(DE-HGF)0 |b 12 | |
| 909 | C | O | |o oai:juser.fz-juelich.de:885223 |p VDB |
| 913 | 1 | |b Schlüsseltechnologien |k P42 |l Grundlagen für zukünftige Informationstechnologien (FIT) |0 G:(DE-Juel1)FUEK412 |v Grundlagen für zukünftige Informationstechnologien |x 0 | |
| 914 | 1 | |y 2008 | |
| 915 | |a Peer review |0 StatID:(DE-HGF)0030 |2 StatID | ||
| 980 | |a contb | ||
| 980 | |a VDB | ||
| 980 | |a I:(DE-Juel1)VDB799 | ||
| 980 | |a I:(DE-82)080009_20140620 | ||
| 980 | |a UNRESTRICTED | ||
| 536 | |a Grundlagen für zukünftige Informationstechnologien |0 G:(DE-Juel1)FUEK412 |c P42 |2 G:(DE-HGF) |x 0 | ||
| 336 | |a INBOOK |2 BibTeX | ||
| 336 | |a bookPart |2 DRIVER | ||
| 336 | |a PSP 2.7.7 Vacuum |0 7 |2 EndNote | ||
| 336 | |a BOOK_CHAPTER |2 ORCID | ||
| 336 | |a Contribution to a book |b contb |m contb |0 PUB:(DE-HGF)7 |s 1637 |2 PUB:(DE-HGF) | ||
| 336 | |a Output Types/Book chapter |2 DataCite | ||
| 920 | |k Halbleiter-Nanoelektronik; IBN-1 |d 31.12.2010 |g IBN |l Halbleiter-Nanoelektronik |0 I:(DE-Juel1)VDB799 |x 0 | ||
| 920 | |k JARA-FIT; JARA-FIT |0 I:(DE-82)080009_20140620 |l Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology |g JARA |x 1 | ||
| 991 | |a Loo, R. |0 P:(DE-HGF)0 |b 9 | ||
| 991 | |a Zhao, Q. T. |0 P:(DE-Juel1)VDB5539 |b 8 |u FZJ | ||
| 991 | |a Buca, Dan Mihai |0 P:(DE-Juel1)125569 |b 7 |u FZJ | ||
| 991 | |a Petzold, M. |0 P:(DE-HGF)0 |b 12 | ||
| 991 | |a Mantl, S. |0 P:(DE-Juel1)VDB4959 |b 6 |u FZJ | ||
| 990 | |a Reiche, M. |0 P:(DE-HGF)0 |b 0 | ||
| 991 | |a Muster, F. |0 P:(DE-HGF)0 |b 11 | ||
| 991 | |a Gösele, U. |0 P:(DE-HGF)0 |b 5 | ||
| 991 | |a Nguyen, D. |0 P:(DE-HGF)0 |b 10 | ||
| 991 | |a Erfurth, W. |0 P:(DE-HGF)0 |b 4 | ||
| 991 | |a Christiansen, S. |0 P:(DE-HGF)0 |b 3 | ||
| 991 | |a Himcinschi, C. |0 P:(DE-HGF)0 |b 2 | ||
| 991 | |a Moutanabir, O. |0 P:(DE-HGF)0 |b 1 | ||