Subject
thin film technology
27
thin film
23
chemical vapor deposition
22
epitaxy
21
film deposition
10
sputtering
10
molecular beam epitaxy
9
etching
8
heterostructure
8
plasma etching
8
plasma processing
7
vapor deposited coating
6
coating
5
growth
5
silicon
5
vacuum deposition
5
III - V semiconductor
4
evaporation
4
film
4
microelectronics
4
plasma deposition
4
solar cell
4
surface analysis
4
deposition
3
membrane
3
optoelectronics
3
perovskite
3
plasma physics
3
preparation
3
semiconductor
3
silicide
3
surface modification
3
adsorption
2
coating process
2
compound semiconductor
2
crystal growth
2
electrical properties
2
electrochemistry
2
electronic properties
2
ferroelectric material
2
ion beam
2
ion beam surface modification
2
ion beam technology
2
ion implantation
2
nanostructured material
2
nitride
2
oxygen
2
plasma diagnostics
2
semiconducting film
2
semiconductor heterostructure
2
more ...