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Chang, C. Y.
ULSI (ultra large scale integration)
AND
reliability
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Chang, C. Y.
ULSI (ultra large scale integration)
AND
reliability
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Select result number 1
1
Book
ULSI technology /
Chang, C. Y.
1996
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VLSI
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IBN-1-2
1
IFF
1
Name
Chang, C. Y.
Subject
ULSI (ultra large scale integration)
chemical vapor deposition
1
epitaxy
1
etching
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fabrication
1
lithography
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Classification
FGK - Thin film technology, epitaxy
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FGM - Microelectronic technology
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TBL - VLSI
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