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Machlin, Eugene S.
FGM - Microelectronic technology
Print Edition
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Machlin, Eugene S.
FGM - Microelectronic technology
Print Edition
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1
Book
Materials
science
in microelectronics. 2. The effects of structure on properties in thin films /
Machlin, Eugene S.
1998
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2
Book
Materials
science
in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
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in microelectronics ;...
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2
IMD-3
1
Name
Machlin, Eugene S.
Subject
microelectronics
2
thin film technology
2
defect
1
electrical properties
1
film deposition
1
magnetic properties
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mechanical properties
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optical properties
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structure
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Classification
FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
FFP - Physics of thin films
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