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FGT - Microtechnology
microelectronics
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microtechnology
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FGT - Microtechnology
microelectronics
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microtechnology
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1
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Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
Michel, B.
2000
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2
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Smart structures and materials 1995: smart electronics : SPIE symposium on smart materials and structures 1995: proceedings : Conference on smart electronics : San-Diego, CA, 02.03...
Varadan, Vijay. K.
1995
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Microsystem technology /
Menz, Wolfgang.
2001
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3
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Book
3
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Conference Publication
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ZB
3
IBN-1-2
1
Name
Menz, Wolfgang.
1
Michel, B.
1
Mohr, Jürgen.
1
Paul, Oliver.
1
Varadan, Vijay. K.
1
Subject
microelectronics
microtechnology
antenna
1
lithography
1
microfabrication (for microelectronics only)
1
microstructure
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microwave equipment
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packaging
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Classification
FGM - Microelectronic technology
3
FGT - Microtechnology
TBD - Microelectronics
1
TBW - Sensors, actuators
1
TCLB - Electric waves, microwaves, Radar
1
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