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lithography
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microelectronics
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microtechnology
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Microsystem technology /
Menz, Wolfgang.
2001
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The Physics of micro/nano-fabrication /
Brodie, Ivor.
1992
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Brodie, Ivor.
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Menz, Wolfgang.
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Mohr, Jürgen.
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Muray, Julius J.
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Paul, Oliver.
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lithography
microelectronics
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ion beam processing
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microfabrication (for microelectronics only)
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microstructure
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FGT - Microtechnology
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