Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
FGKJ - Plasma processing, etching
Reset Filters
Show filters (1)
FGKJ - Plasma processing, etching
Ask a Librarian
Books & more
: Hits
1 - 7
of
7
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Low energy ion beam and plasma modification of materials : Symposium on low energy ion beam and plasma modification of materials : Spring Materials Research Society conference 1991...
Harper, J. M.
1991
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Bernhardt, A. F.
1990
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 3
3
Book
Characterization of plasma enhanced cvd processes: symposium: proceedings : Boston, MA, 27.11.89-28.11.89.
Lucovsky, G.
1990
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 4
4
Book
Symposium on plasma processing and synthesis of materials : Anaheim, CA, 21.04.87-23.04.87 /
Apelian, Diran
1987
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 5
5
Book
Plasma processing: symposium : Palo-Alto, CA, 15.04.1986-18.04.1986.
Coburn, J. W.
1986
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 6
6
Book
Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
Chang, R. P.
1985
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 7
7
Book
Plasma processing and synthesis of materials : Materials Research Society annual meeting. 1983 : Boston, MA, 14.11.1983-17.11.1983.
Szekely, J.
1984
“
...
FAF
-
Materialforschung
-
allgemeine
Serien
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
/* Narrow Search Options */ ?>
Back
Narrow Search Results
Available as
Print Edition
7
Material Type
Book
7
Type of Literature
Conference Publication
7
Year of Publication
From:
To:
Location
ZB
7
IEK-4
1
Name
Apelian, Diran
1
Bernhardt, A. F.
1
Chang, R. P.
1
Coburn, J. W.
1
Harper, J. M.
1
Lucovsky, G.
1
more ...
Szekely, J.
1
Szekely, Julian
1
see all ...
less ...
Subject
plasma processing
3
ion beam processing
2
chemical vapor deposition
1
electron beam processing
1
etching
1
laser processing
1
more ...
plasma deposition
1
plasma etching
1
see all ...
less ...
Classification
FAF - Materials research - comprehensive works
7
FGKJ - Plasma processing, etching
FGG - Ion beam technology
1
FGJ - Laser and electron beam processing
1
Language
English
1
/* End Narrow Search Options */ ?>
×
Loading...