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semiconductor processing
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semiconductor processing
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1
Book
Ion solid interactions for materials modification and processing: symposium : MRS fall meeting 1995 : Boston, MA, 27.11.95-01.12.95.
Poker, David Brian
1996
“
...
FGA
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Materials
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-
general
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...
”
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2
Book
Processing of semiconductors.
Jackson, K. A.
1996
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Materials
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”
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ZB
2
IBN-1-2
1
Name
Jackson, K. A.
1
Poker, David Brian
1
Subject
semiconductor processing
X-ray diffraction
1
compound semiconductor
1
insulator
1
interaction
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ion
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ion beam
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ion implantation
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materials processing
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mixing
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optical material
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plasma
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polymer
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radiation damage
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solid
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FGA - Materials processing - general aspects
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FAF - Materials research - comprehensive works
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FGK - Thin film technology, epitaxy
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FGM - Microelectronic technology
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TBF - Semiconductor devices
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