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FGKJ - Plasma processing, etching
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FGKJ - Plasma processing, etching
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Low energy ion beam and plasma modification of materials : Symposium on low energy ion beam and plasma modification of materials : Spring Materials Research Society conference 1991...
Harper, J. M.
1991
“
...
FGG
-
Ion
beam
technology
...
”
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Harper, J. M.
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ion beam processing
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plasma processing
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FAF - Materials research - comprehensive works
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FGG - Ion beam technology
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FGKJ - Plasma processing, etching
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