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E-Book
Geregelte Strahlaufweitung bei der Ionenimplantation [E-Book] /c von U. Kurz ; W. Reimer ; U. Kammel ; A. van der Hart und J. Schelten
Kurz, U.
1988
“
...
FGGB
-
Ion
implantation
,
ion
beam
synthesis
...
”
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Kammel, U.
1
Kurz, U.
Reimer, W.
1
Schelten, J.
1
Van der Hart, A.
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FGGB - Ion implantation, ion beam synthesis
1
PEDB - Ion radiation, ion optics
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