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FJKB - Elemental semiconductors
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FJKB - Elemental semiconductors
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1
Book
Quantitative Augerelektronenspektroskopie zur Tiefenprofilanalyse von Schichtsystemen am Beispiel von Silizium nach Nickelimplantation /
Schoenborn, A.
1991
“
...
FGGB
-
Ion
implantation
,
ion
beam
synthesis
...
”
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2
Book
Implantation of boron in silicon.
Hofker, W. K.
1975
“
...
FGGB
-
Ion
implantation
,
ion
beam
synthesis
...
”
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2
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ZB
2
Name
Hofker, W. K.
1
Schoenborn, A.
1
Subject
Auger electron spectroscopy
1
depth profiling
1
ion implantation
1
nickel
1
silicon
1
Classification
FGGB - Ion implantation, ion beam synthesis
2
FJKB - Elemental semiconductors
FFGC - Electron spectroscopy
1
Language
German
1
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