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FJLB - Physics of semiconductor devices
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FJLB - Physics of semiconductor devices
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1
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Fortgeschrittene Implantationstechnik.
Kostka, A.
1979
“
...
FGGB
-
Ion
implantation
,
ion
beam
synthesis
...
”
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2
Book
Ion implantation range data for silicon and germanium device technologies.
Smith, B.
1977
“
...
FGGB
-
Ion
implantation
,
ion
beam
synthesis
...
”
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Kostka, A.
1
Quast, W.
1
Smith, B.
1
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FGGB - Ion implantation, ion beam synthesis
2
FJLB - Physics of semiconductor devices
FAAB - Solid state physics - reference books
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