1
2
3
4
5
6
“...FGGB - Ion implantation, ion beam synthesis...”
7
8
9
Ion implantation in semiconductors : proceedings of the US Japan seminar : Kyoto, 09.08.71-12.08.71.
Namba, S.
1972
“...FGGB - Ion implantation, ion beam synthesis...”1972
10
11