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Behrisch, R.
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Behrisch, R.
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1
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Sputtering by particle bombardment vol 0003: characteristics of sputtered particles, technical applications.
Behrisch, R.
1991
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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2
Book
Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
Behrisch, R.
1983
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...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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IEK-4
2
ZB
2
IBN-3-4
1
Name
Behrisch, R.
Betz, G.
1
Subject
sputtering
2
Classification
FGKC - Vacuum deposition, MBE
2
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