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1
Book
Atomic layer deposition of nanostructured materials /
Pinna, Nicola
2012
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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PGI-7
1
ZB
1
Name
Pinna, Nicola
1
Subject
chemical vapor deposition
1
coating
1
epitaxy
1
film deposition
1
nanostructured material
1
sol gel process
1
Classification
FGK - Thin film technology, epitaxy
1
FGN - Nanotechnology
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English
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