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1
Book
Molecular beam epitaxy : fundamentals and current status /
Herman, Marian A.
1996
“
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FGK
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Dünnfilmtechnologie
,
Epitaxie
...
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2
Book
Etching of III-V semiconductors : an electrochemical approach /
Notten, P. H. L.
1991
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FGK
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Dünnfilmtechnologie
,
Epitaxie
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3
Book
Thin films by chemical vapour deposition.
Morosanu, C. E.
1990
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Dünnfilmtechnologie
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4
Book
Dünnschichttechnologie /
Frey, Hartmut.
1987
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Dünnfilmtechnologie
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5
Book
The Technology and physics of molecular beam epitaxy /
Parker, E. H. C.
1985
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FGK
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Dünnfilmtechnologie
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6
Book
Molecular beam epitaxy and heterostructures : Nato Advanced Study Institute on Molecular Beam Epitaxy (mbe) and Heterostructures: proceedings : Erice, 07.03.1983-19.03.1983.
Chang, L. L.
1985
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7
Book
Handbook of thin film technology.
Maissel, L. I.
1970
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FGK
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Dünnfilmtechnologie
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Epitaxie
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Available as
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7
Material Type
Book
7
Type of Literature
Handbook, Textbook
2
Conference Publication
1
Year of Publication
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To:
Location
IBN-1-2
ZB
7
IBN-3-4
1
IKP
1
PTJ
1
Name
Chang, L. L.
1
Frey, Hartmut.
1
Herman, Marian A.
1
Kelly, J. J.
1
Kienel, Gerhard.
1
Maissel, L. I.
1
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Morosanu, C. E.
1
Notten, P. H. L.
1
Parker, E. H. C.
1
Sitter, Helmut.
1
Van der Meerakker, J. E. A. M.
1
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Subject
molecular beam epitaxy
2
III - V semiconductor
1
chemical vapor deposition
1
epitaxy
1
etching
1
film deposition
1
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heterostructure
1
insulating film
1
magnetic film
1
semiconducting film
1
superconducting film
1
thin film
1
thin film technology
1
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Classification
FGKC - Vacuum deposition, MBE
3
FGK - Thin film technology, epitaxy
2
FFP - Physics of thin films
1
FFPG - Multilayer systems, quantum structures
1
FGKF - Chemical vapor deposition
1
FGKJ - Plasma processing, etching
1
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FJKC - III - V semiconductors
1
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