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Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies /
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Principles of plasma discharges and materials processing /
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Sputtering by particle bombardment vol 0003: characteristics of sputtered particles, technical applications.
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Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
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Sputtering by particle bombardment . 1: physical sputtering of single element solids /
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Glow discharge processes : sputtering and plasma etching /
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Thin film processes /
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