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1
Book
Handbook of advanced plasma processing techniques /
Shul, R. J.
2000
“
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FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
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2
Book
Materials science in microelectronics. 2. The effects of structure on properties in thin films /
Machlin, Eugene S.
1998
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FGK
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Dünnfilmtechnologie
,
Epitaxie
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3
Book
Materials science in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
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FGK
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Dünnfilmtechnologie
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Epitaxie
...
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4
Book
Vakuumbeschichtung Vol 0004: Anwendungen Vol 0001: Vergleich der verwendeten Verfahren, elektrische Widerstandsschichten, supraleitende Schichten, dünne Schichten für Optik, Mikroe...
Kienel, G.
1993
“
...
FGK
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Dünnfilmtechnologie
,
Epitaxie
...
”
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4
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Book
4
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ZB
4
IEK-5
1
Name
Machlin, Eugene S.
2
Kienel, G.
1
Shul, R. J.
1
Subject
microelectronics
thin film technology
3
compound semiconductor
1
defect
1
electrical properties
1
etching
1
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film deposition
1
magnetic material
1
magnetic properties
1
materials processing
1
mechanical properties
1
optical properties
1
optics
1
optoelectronics
1
plasma processing
1
sensor (technical and physical)
1
solar cell
1
structure
1
superconducting film
1
transport properties
1
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Classification
FGK - Thin film technology, epitaxy
3
FGM - Microelectronic technology
3
FFP - Physics of thin films
1
FGKJ - Plasma processing, etching
1
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