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vacuum deposition
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1
Book
Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
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2
Book
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
Kienel, G.
1995
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FGK
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Dünnfilmtechnologie
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Epitaxie
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3
Book
Vakuumbeschichtung Vol 0003: Anlagenautomatisierung, Messtechnik und Analysentechnik.
Kienel, G.
1994
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FGK
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Dünnfilmtechnologie
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Epitaxie
...
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4
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Thin films from free atoms and particles /
Klabunde, Kenneth J.
1985
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FGK
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Dünnfilmtechnologie
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Epitaxie
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5
Book
Vacuum deposition of thin films.
Holland, L.
1956
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FGK
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Dünnfilmtechnologie
,
Epitaxie
...
”
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Available as
Print Edition
5
Material Type
Book
5
Year of Publication
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Location
ZB
5
Name
Kienel, G.
2
Frey, H.
1
Holland, L.
1
Klabunde, Kenneth J.
1
Subject
vacuum deposition
surface analysis
2
automation
1
etching
1
evaporation
1
ion beam technology
1
more ...
ion implantation
1
ion plating
1
measuring methods
1
plasma diagnostics
1
plasma physics
1
sputtering
1
surface cleaning
1
thin film
1
thin film technology
1
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Classification
FGKC - Vacuum deposition, MBE
4
FGKJ - Plasma processing, etching
2
FGK - Thin film technology, epitaxy
1
FGKF - Chemical vapor deposition
1
FHAB - Surface and thin film characterization
1
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