1
Sputtering by particle bombardment vol 0003: characteristics of sputtered particles, technical applications.
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“...FGKC - Vacuum deposition, MBE...”
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Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
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“...FGKC - Vacuum deposition, MBE...”
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Sputtering by particle bombardment . 1: physical sputtering of single element solids /
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“...FGKC - Vacuum deposition, MBE...”
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4
Glow discharge processes : sputtering and plasma etching /
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“...FGKC - Vacuum deposition, MBE...”
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Sputtering : symposium : Proceedings of the symposium : Perchtoldsdorf, 28.04.1980-30.04.1980.
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Varga, P.
1980
“...FGKC - Vacuum deposition, MBE...”
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