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1
Book
Handbook of sputter deposition technology : principles, technology, and applications /
Wasa, Kiyotaka.
1992
“
...
FGKC
-
Vacuum
deposition
,
MBE
...
”
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2
Book
Vacuum technology, thin films, and sputtering : an introduction /
Stuart, R. V.
1983
“
...
FGKC
-
Vacuum
deposition
,
MBE
...
”
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3
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
“
...
FGKC
-
Vacuum
deposition
,
MBE
...
”
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Select result number 4
4
Book
Bedampfungstechnik : Verfahren, Einrichtungen, Anwendungen.
Schiller, S.
1975
“
...
FGKC
-
Vacuum
deposition
,
MBE
...
”
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Available as
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4
Material Type
Book
4
Type of Literature
Handbook, Textbook
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ZB
4
IEK-4
1
Name
Chapman, Brian N.
1
Hayakawa, Shigeru.
1
Heisig, U.
1
Schiller, S.
1
Stuart, R. V.
1
Wasa, Kiyotaka.
1
Subject
evaporation
1
glow discharge
1
plasma etching
1
sputter deposition
1
sputtering
1
vacuum deposition
1
more ...
vacuum technique
1
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Classification
FGKC - Vacuum deposition, MBE
4
FGKJ - Plasma processing, etching
1
PGCC - Electric discharges in gases
1
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