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GaN/Al(Ga)N heterostructures : MBE growth, electronic properties and polarization fields [E-Book] /
“...FGKC - Vacuum deposition, MBE...”

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Kinetic growth manipulation during molecular beam epitaxy [E-Book] /
“...FGKC - Vacuum deposition, MBE...”

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Sputtering by particle bombardment . 1: physical sputtering of single element solids /
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“...FGKC - Vacuum deposition, MBE...”
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