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Annett, D. M.
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Annett, D. M.
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1
Book
Radio frequency/radiation and plasma processing : industrial applications & advances /
Annett, D. M.
1985
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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ZB
1
Name
Annett, D. M.
Cheremisinoff, Paul N.
1
Farah, Oscar G.
1
Ouellette, Robert P.
1
Subject
beam processing
1
materials processing
1
plasma processing
1
Classification
FGA - Materials processing - general aspects
1
FGJ - Laser and electron beam processing
1
FGKJ - Plasma processing, etching
1
Language
English
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