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Nöthe, Michael
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Nöthe, Michael
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1
E-Book
Plasmagestützte Abscheidung und Charakterisierung von dünnen mehrphasigen Schichten [E-Book] /
Nöthe, Michael
2000
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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Available as
Electronic Edition
1
Material Type
Book
1
Type of Literature
Theses
1
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Location
ZB
1
Name
Nöthe, Michael
Subject
coating
1
film deposition
1
plasma processing
1
surface properties
1
Classification
FGKJ - Plasma processing, etching
1
FHAB - Surface and thin film characterization
1
FPU - Corrosion protection, surface coating
1
Language
German
1
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