1
Handbook of advanced plasma processing techniques /
Book
...FGKJ - Plasma processing, etching...
2
La gravure seche et le depot plasma en microelectronique: symposium international. 0003 : Cachan, 26.11.1985-29.11.1985.
Book
1985
...FGKJ - Plasma processing, etching...
3
Applications of plasma processes to VLSI technology /
Book
...FGKJ - Plasma processing, etching...
4
Plasma processing for VLSI.
Book
...FGKJ - Plasma processing, etching...
5
Dry etching for microelectronics.
Book
...FGKJ - Plasma processing, etching...